Paper
12 July 1994 Preliminary characterization of a new hybrid structure with CdTe: x-ray imaging capabilities
Marc Cuzin, Francis Glasser, R. Mermet, N. Meunier, Olivier C. Peyret, Philippe Rambaud
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Abstract
This paper presents a new structure of a 2-D imaging system devoted to radiology. The detection upper medium, made with bulk cadmium telluride, is connected to the electronic 2D readout circuit through indium bumps. The 60 X 60 micrometers 2 electrodes, 100 micrometers pitch, are made on the CdTe:Cl detector with standard lithography and ion etching techniques. The silicon circuit is made of n X n independent integrated amplifiers with serial multiplexing readout. The feasibility of such arrangement is made with 64 X 64 pixels. The thickness of 900 micrometers is well suited for 100 keV x rays. Characterization is performed with 10 ms x-ray pulses. Due to electric field the charges are well channelled and high spatial resolution is available in addition with a very high absorption efficiency. The direct absorption of x ray in the readout circuit is negligible. It does not affect either the signal to noise ratio, or the lifetime of the silicon low level analogue ASIC. The presentation includes linearity, sensitivity, noise FTM, and dynamic image discussion.
© (1994) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Marc Cuzin, Francis Glasser, R. Mermet, N. Meunier, Olivier C. Peyret, and Philippe Rambaud "Preliminary characterization of a new hybrid structure with CdTe: x-ray imaging capabilities", Proc. SPIE 2278, X-Ray and UV Detectors, (12 July 1994); https://doi.org/10.1117/12.180024
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Cited by 9 scholarly publications.
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KEYWORDS
X-rays

Sensors

X-ray detectors

X-ray imaging

Indium

Amplifiers

Electrodes

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