Infrared optically active structure obtained by Plasma Assisted Deposition (PAD) of III-V and II-VI binary compound thin layers

Victor Rares Medianu; Stefan A. Manea; Mihail F. Lazarescu

doi:10.1117/12.203483

8 March 1995 Infrared optically active structure obtained by plasma-assisted deposition (PAD) of III-V and II-VI binary compound thin layers

Victor Rares Medianu, Stefan A. Manea, Mihail F. Lazarescu

Author Affiliations +

Proceedings Volume 2461, ROMOPTO '94: Fourth Conference in Optics; (1995) https://doi.org/10.1117/12.203483
Event: ROMOPTO '94: 4th Conference on Optics, 1994, Bucharest, Romania

Abstract

A possible mechanism for the chemical interactions during the argon plasma assisted deposition of thin layers of A^IIIB^V and A^IIB^VI binary compounds is presented. The model is aimed to serve as a basis to guide the experimental conditions for the obtaining of reflective or anti-reflective stoichiometric films on different substrates used as laser optical components. The theoretical assumptions were found in a good agreement with the results of the structural and optical properties measurements in case of ZnS and GaAs deposition from polycrystalline targets on (100) oriented GaAs singlecrystalline substrates. X- ray diffractometry and scanning electronic microscopy as well as IR transmission techniques were used in this respect.

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Victor Rares Medianu, Stefan A. Manea, and Mihail F. Lazarescu "Infrared optically active structure obtained by plasma-assisted deposition (PAD) of III-V and II-VI binary compound thin layers", Proc. SPIE 2461, ROMOPTO '94: Fourth Conference in Optics, (8 March 1995); https://doi.org/10.1117/12.203483

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