Predicting mask performance by numerical simulation

Qi-De Qian; Giang T. Dao; Pei-yang Yan; Francisco A. Leon

doi:10.1117/12.228201

8 December 1995 Predicting mask performance by numerical simulation

Qi-De Qian, Giang T. Dao, Pei-yang Yan, Francisco A. Leon

Proceedings Volume 2621, 15th Annual BACUS Symposium on Photomask Technology and Management; (1995) https://doi.org/10.1117/12.228201
Event: 15th Annual BACUS Symposium on Photomask Technology and Management '95, 1995, Santa Clara, CA, United States

Abstract

In this paper, we present a method for linking a finite element Maxwell's equation solver with a scalar lithography simulator, iPHOTO-II. The combined simulator takes the mask topography and the stepper parameters as input and simulates the resist profile on the wafer plane. The accuracy of the simulator is demonstrated by comparing simulation results with experimental data over a wide range of focus, exposure and mask dimensions. The simulator is used to predict the performance of a phase edge phase shift mask. It is revealed that the true position of the line center in a phase edge PSM is shifted slightly from the location given by geometric projection. Biasing rules for compensating for this location shift are presented.

Citation Download Citation

Qi-De Qian, Giang T. Dao, Pei-yang Yan, and Francisco A. Leon "Predicting mask performance by numerical simulation", Proc. SPIE 2621, 15th Annual BACUS Symposium on Photomask Technology and Management, (8 December 1995); https://doi.org/10.1117/12.228201

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available