UV photosensitivity in PECVD-grown germanosilicate waveguides

David J. Moss; Mike V. Bazylenko; Mark Gross; Pak Lim Chu; Marcy Faith; Patrick W. Leech; P. Kemeny; Morten Ibsen; Otto Leistiko; C. V. Poulson; John D. Love; Francois J. Ladouceur

doi:10.1117/12.237769

8 April 1996 UV photosensitivity in PECVD-grown germanosilicate waveguides

David J. Moss, Mike V. Bazylenko, Mark Gross, Pak Lim Chu, Marcy Faith, Patrick W. Leech, P. Kemeny, Morten Ibsen, Otto Leistiko, C. V. Poulson, John D. Love, Francois J. Ladouceur

Author Affiliations +

Proceedings Volume 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics; (1996) https://doi.org/10.1117/12.237769
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

We demonstrate all optically (UV) written waveguide grating structures in germanosilicate trilayers grown by conventional PECVD, as well as novel results with a new hollow cathode PECVD growth technique which is capable of producing films having either positive or negative UV photosensitivity.

Citation Download Citation

David J. Moss, Mike V. Bazylenko, Mark Gross, Pak Lim Chu, Marcy Faith, Patrick W. Leech, P. Kemeny, Morten Ibsen, Otto Leistiko, C. V. Poulson, John D. Love, and Francois J. Ladouceur "UV photosensitivity in PECVD-grown germanosilicate waveguides", Proc. SPIE 2703, Lasers as Tools for Manufacturing of Durable Goods and Microelectronics, (8 April 1996); https://doi.org/10.1117/12.237769

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available