Capability of piezoceramic-driven probe techniques for manufacturing of nanostructures

Herbert Pagnia

doi:10.1117/12.238196

8 April 1996 Capability of piezoceramic-driven probe techniques for manufacturing of nanostructures

Herbert Pagnia

Proceedings Volume 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications; (1996) https://doi.org/10.1117/12.238196
Event: Metal/Nonmetal Microsystems: Physics, Technology, and Applications, 1995, Polanica Zdroj, Poland

Abstract

This contribution is concerned with the question of if the scanning tunneling microscope (STM) or possibly its relatives out of the group of the diverse scanning probe microscopes (SPM) developed in recent years are reliable tools for atomic scale -- or at least nanometric -- modifications of solid state surfaces or for building structures on it, especially for various purposes like (1) high-density memory storage, (2) nanolithography, or more general: (3) nanofabrication and (4) atom and molecule manipulation. From these points of view the last years results are reviewed.

Citation Download Citation

Herbert Pagnia "Capability of piezoceramic-driven probe techniques for manufacturing of nanostructures", Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); https://doi.org/10.1117/12.238196

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