Performance of i- and g-line phase-shift measurement system MPM-100

Hiroshi Fujita; Hisatake Sano; Haruhiko Kusunose; Hideo Takizawa; Kouji Miyazaki; Naoki Awamura; Takahiro Ode; Daikichi Awamura

doi:10.1117/12.245227

24 July 1996 Performance of i- and g-line phase-shift measurement system MPM-100

Hiroshi Fujita, Hisatake Sano, Haruhiko Kusunose, Hideo Takizawa, Kouji Miyazaki, Naoki Awamura, Takahiro Ode, Daikichi Awamura

Author Affiliations +

Proceedings Volume 2793, Photomask and X-Ray Mask Technology III; (1996) https://doi.org/10.1117/12.245227
Event: Symposium on Photomask and X-Ray Mask Technology, 1996, Kawasaki City, Japan

Abstract

The performance of an i-/g-line direct-phase measurement system Lasertec MPM- 100 has been evaluated. The minimum measurable pattern sizes is 2.5 .μm for holes on an 8%-i-line transmittance halftone phase shift masks (HPSMs). The effect of the focus position is not significant for hole pattern of above 3.5 μm. Both short-term repeatability and long-term stability are excellent, being less than 0.5 deg. The effect of the illumination NA has been investigated theoretically and experimentally, and the use of correction factors based on experiment is proposed for estimating effective phase shifts from phase shifts obtained by MPM- 100.

Citation Download Citation

Hiroshi Fujita, Hisatake Sano, Haruhiko Kusunose, Hideo Takizawa, Kouji Miyazaki, Naoki Awamura, Takahiro Ode, and Daikichi Awamura "Performance of i- and g-line phase-shift measurement system MPM-100", Proc. SPIE 2793, Photomask and X-Ray Mask Technology III, (24 July 1996); https://doi.org/10.1117/12.245227

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