Penta-Prism Long Trace Profiler (PPLTP) for measurement of grazing incidence space optics

Shinan Qian; Haizhang Li; Peter Z. Takacs

doi:10.1117/12.245083

19 July 1996 Penta-Prism Long Trace Profiler (PPLTP) for measurement of grazing incidence space optics

Shinan Qian, Haizhang Li, Peter Z. Takacs

Proceedings Volume 2805, Multilayer and Grazing Incidence X-Ray/EUV Optics III; (1996) https://doi.org/10.1117/12.245083
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

The long trace profiler (LTP) is in use at a number of locations throughout the world for the measurement of the figure and mid-frequency roughness of x-ray mirrors. The standard configuration requires that the surface tested lie in a horizontal plane as the optical head is scanned along a horizontal line. For applications where gravity-induced sag of the surface cannot be tolerated, such as in x-ray telescope mirror metrology, it is desirable to measure the mirror as it is mounted in a vertical configuration. By making simple modifications to the standard LTP system, we have demonstrated that it is possible to use the LTP principle to measure the surface of x-ray mirrors and mandrels mounted in the vertical orientation. The major change in the LTP system is the use of a penta prism on a vertical translation stage to direct the probe beam onto the surface and the addition of a precision rotation stage to hold the test object. A 3D map of the surface topography of the complete cylindrical asphere can be generated quite easily with this technique. Measurements with a prototype system indicate a slope error accuracy of better than 1 microradian is possible, with a figure error repeatability of better than 50 nm.

Citation Download Citation

Shinan Qian, Haizhang Li, and Peter Z. Takacs "Penta-Prism Long Trace Profiler (PPLTP) for measurement of grazing incidence space optics", Proc. SPIE 2805, Multilayer and Grazing Incidence X-Ray/EUV Optics III, (19 July 1996); https://doi.org/10.1117/12.245083

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