Design and performance of the VLT 8-m coating unit

Michael W. Schneermann; Martin Groessl; U. Nienaber; E. Ettlinger; J. A. Spiteri; H. Clow

doi:10.1117/12.269032

21 March 1997 Design and performance of the VLT 8-m coating unit

Michael W. Schneermann, Martin Groessl, U. Nienaber, E. Ettlinger, J. A. Spiteri, H. Clow

Proceedings Volume 2871, Optical Telescopes of Today and Tomorrow; (1997) https://doi.org/10.1117/12.269032
Event: Optical Telescopes of Today and Tomorrow, 1996, Landskrona/Hven, Sweden

Abstract

The 8 m coating unit for the VLT mirrors is designed for the deposition of high reflective, homogeneous aluminum coatings. For the process of the film deposition the sputter technology is utilized. The design of the following major subsystems is completed: the vacuum vessel and the vacuum generation system, the thin film deposition equipment and the glow discharge cleaning device, the substrate support and rotation system as well as the supporting framework and the auxiliary equipment. Manufacturing of the coating unit has started. The pre- assembly and testing activities, which will take place prior to the shipment to the site, are defined. This paper describes the design features and the major performance requirements of the 8 m coating unit. The performance of the sputter source design has been verified in a qualification test. The deposition rate, the film thickness and reflectance, as well as the film purity have been measured. The test set-up and the results of the qualification tests of the selected magnetron type are presented and discussed.

Citation Download Citation

Michael W. Schneermann, Martin Groessl, U. Nienaber, E. Ettlinger, J. A. Spiteri, and H. Clow "Design and performance of the VLT 8-m coating unit", Proc. SPIE 2871, Optical Telescopes of Today and Tomorrow, (21 March 1997); https://doi.org/10.1117/12.269032

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