Fine characterization of ITO layers by spectroscopic ellipsometry

Pierre Boher; Christophe Defranoux; Jean-Philippe Piel; Jean-Louis P. Stehle; Y. Suzuki

doi:10.1117/12.246246

16 August 1996 Fine characterization of ITO layers by spectroscopic ellipsometry

Pierre Boher, Christophe Defranoux, Jean-Philippe Piel, Jean-Louis P. Stehle, Y. Suzuki

Author Affiliations +

Proceedings Volume 2873, International Symposium on Polarization Analysis and Applications to Device Technology; (1996) https://doi.org/10.1117/12.246246
Event: International Symposium on Polarization Analysis and Applications to Device Technology, 1996, Yokohama, Japan

Abstract

Indium tin oxide films (ITO) are characterized precisely by spectroscopic ellipsometry which determines not only the thickness of the layers but also the optical indices in a large spectral range. The quality of the ITO films is checked by the transparency of the layers in the visible range 0.4 to 0.6 micrometers . Indeed, target degradation is detected by the occurrence of an absorption band in this region. The electrical conductivity of the layer can also be deduced by the Drude model applied to the absorption in the infrared region. Moreover, spectroscopic ellipsometry can give all these information on all the surface of the panels, checking at the same time the homogeneity and the stability of the deposition process. Different experimental examples will be presented and discussed.

Citation Download Citation

Pierre Boher, Christophe Defranoux, Jean-Philippe Piel, Jean-Louis P. Stehle, and Y. Suzuki "Fine characterization of ITO layers by spectroscopic ellipsometry", Proc. SPIE 2873, International Symposium on Polarization Analysis and Applications to Device Technology, (16 August 1996); https://doi.org/10.1117/12.246246

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE