Development of deep-UV MoSi-based embedded phase-shifting mask (EPSM) blanks

Masao Ushida; Masaru Mitsui; Kimihiri Okada; Yasushi Okubo; Hideki Suda; Hideo Kobayashi; Keishi Asakawa

doi:10.1117/12.262825

27 December 1996 Development of deep-UV MoSi-based embedded phase-shifting mask (EPSM) blanks

Masao Ushida, Masaru Mitsui, Kimihiri Okada, Yasushi Okubo, Hideki Suda, Hideo Kobayashi, Keishi Asakawa

Proceedings Volume 2884, 16th Annual BACUS Symposium on Photomask Technology and Management; (1996) https://doi.org/10.1117/12.262825
Event: 16th Annual BACUS Symposium on Photomask Technology and Management, 1996, Redwood City, CA, United States

Abstract

Embedded phase-shift mask (EPSM) has an advantage in comparison with several other phase-shifting mask approaches because of its simple structure and fabrication process. We tried to modify MoSi-based EPSM blanks by re-examining the material and by optimizing sputtering condition in order to produce more useful EPSM blanks for Deep UV lithography technology. New MoSi-based EPSM blanks for which Nitrogen gas is used as the reactive sputtering gas has been developed. And it has been confirmed that the New MoSi-based EPSM (MoSi-N) blanks are superior to HOYA previously developed one (MoSi-ON) in chemical durability, manufacturing stability and Dry Etching property.

Citation Download Citation

Masao Ushida, Masaru Mitsui, Kimihiri Okada, Yasushi Okubo, Hideki Suda, Hideo Kobayashi, and Keishi Asakawa "Development of deep-UV MoSi-based embedded phase-shifting mask (EPSM) blanks", Proc. SPIE 2884, 16th Annual BACUS Symposium on Photomask Technology and Management, (27 December 1996); https://doi.org/10.1117/12.262825

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available