Improvement of CD uniformity with PBS by optimizing the crossover development step

Robert L. Dean; Charles A. Sauer

doi:10.1117/12.262834

27 December 1996 Improvement of CD uniformity with PBS by optimizing the crossover development step

Robert L. Dean, Charles A. Sauer

Proceedings Volume 2884, 16th Annual BACUS Symposium on Photomask Technology and Management; (1996) https://doi.org/10.1117/12.262834
Event: 16th Annual BACUS Symposium on Photomask Technology and Management, 1996, Redwood City, CA, United States

Abstract

Critical dimension (CD) uniformity performance has improved significantly over the years by optimizing postbaking and development steps. As we continue to improve CD uniformity with PBS, our focus has shifted to other steps in the process. The crossover step, the point in the process where both develop and rinse are introduced simultaneously, has often been thought to have little or no effect on the develop time or to influence the uniformity results. However, careful examination of this step has determined that the crossover time, spin speed, and concentration of the develop/rinse mixture can have a significant effect on CD uniformity. Reduction of the typical radial effect was noted. Several design of experiment projects were run to examine these variables. A screening experiment was first run to determine the significant variables and their influence on uniformity. An optimization run was then made on crossover conditions, which included examination of plates from several vendors. Repeatability and sensitivity of the process to other variables were also determined. Results and recommendations are presented in this paper.

Citation Download Citation

Robert L. Dean and Charles A. Sauer "Improvement of CD uniformity with PBS by optimizing the crossover development step", Proc. SPIE 2884, 16th Annual BACUS Symposium on Photomask Technology and Management, (27 December 1996); https://doi.org/10.1117/12.262834

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