Effect of salt on the dissolution of novolac in base

Myoung-Soo Kim; Arnost Reiser

doi:10.1117/12.275834

7 July 1997 Effect of salt on the dissolution of novolac in base

Myoung-Soo Kim, Arnost Reiser

Proceedings Volume 3049, Advances in Resist Technology and Processing XIV; (1997) https://doi.org/10.1117/12.275834
Event: Microlithography '97, 1997, Santa Clara, CA, United States

Abstract

The increase in dissolution rate brought about by the addition of salt to the developer is caused by the difference in the diffusivities of the OH^- ions of the base and the anions of the salt. Adding salt increases the flux of cations into the film allowing the flux of anions to increase too. The faster OH^- ions, which alone control the dissolution of the resin film, benefit more from this opportunity than the anions of the salt. At very high salt concentrations a retardation-of-dissolution effects sets in that can be understood in terms of a competition of different types of ions for the available percolation sites.

Citation Download Citation

Myoung-Soo Kim and Arnost Reiser "Effect of salt on the dissolution of novolac in base", Proc. SPIE 3049, Advances in Resist Technology and Processing XIV, (7 July 1997); https://doi.org/10.1117/12.275834

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