Function-integrated alicyclic polymer for ArF chemically amplified resists

Katsumi Maeda; Kaichiro Nakano; Shigeyuki Iwasa; Etsuo Hasegawa

doi:10.1117/12.275822

7 July 1997 Function-integrated alicyclic polymer for ArF chemically amplified resists

Katsumi Maeda, Kaichiro Nakano, Shigeyuki Iwasa, Etsuo Hasegawa

Proceedings Volume 3049, Advances in Resist Technology and Processing XIV; (1997) https://doi.org/10.1117/12.275822
Event: Microlithography '97, 1997, Santa Clara, CA, United States

Abstract

We have designed a function-integrated alicyclic polymer, poly[carboxy-tetracyclo(4.4.0.1^2,5.1^7,10)dodecyl methacrylate] [poly(CTCDDMA)], which has both a dry- etching resistant unit (the tetracyclododecyl group) and a carboxyl substituent, inducing alkaline-solubility. This polymer exhibits good dry-etching resistance; the etching rate for chlorine plasma is 1.2 times that for the novolac resist because it contains 100 mol% of the alicyclic groups. It also exhibits good solubility in a TMAH solution and good adhesion to the silicon substrate because of the hydrophilic carboxyl group. The chemically amplified resist composed of the ethoxyethyl-protected copolymer poly(CTCDDMA₆₇-ECTCDDMA₃₃) with a photoacid generator resolved a 0.15-micrometer L/S pattern at 21.8 mJ/cm² using an ArF exposure system (NA equals 0.55).

Citation Download Citation

Katsumi Maeda, Kaichiro Nakano, Shigeyuki Iwasa, and Etsuo Hasegawa "Function-integrated alicyclic polymer for ArF chemically amplified resists", Proc. SPIE 3049, Advances in Resist Technology and Processing XIV, (7 July 1997); https://doi.org/10.1117/12.275822

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available