Status Of The Scanning X-Ray Microscope

B. Niemann; G. Schmahl; D. Rudolph

doi:10.1117/12.933142

24 March 1982 Status Of The Scanning X-Ray Microscope

B. Niemann, G. Schmahl, D. Rudolph

Proceedings Volume 0316, High Resolution Soft X-Ray Optics; (1982) https://doi.org/10.1117/12.933142
Event: 1981 Brookhaven Conferences, 1981, Upton, United States

Abstract

Some details of the scanning X-ray microscope are described. The system is under con-struction for a resolution of 10 to 50 nm.

Citation Download Citation

B. Niemann, G. Schmahl, and D. Rudolph "Status Of The Scanning X-Ray Microscope", Proc. SPIE 0316, High Resolution Soft X-Ray Optics, (24 March 1982); https://doi.org/10.1117/12.933142

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