Field electron emission from highly graphitic diamond films

Binglin Zhang; Ning Yao; Yunjun Li; Jintian He; Xiaoping Wang

doi:10.1117/12.280578

18 August 1997 Field electron emission from highly graphitic diamond films

Binglin Zhang, Ning Yao, Yunjun Li, Jintian He, Xiaoping Wang

Proceedings Volume 3184, Microelectronic Packaging and Laser Processing; (1997) https://doi.org/10.1117/12.280578
Event: ISMA '97 International Symposium on Microelectronics and Assembly, 1997, Singapore, Singapore

Abstract

The diamond films were prepared by a microwave chemical vapor deposition system. The molybdenum substrates were used. The x-ray diffraction spectra of the films contain peaks of the (111) and (220) facets of diamond. Scanning electron microscope and optical mecrograph reveal that the films consist of ball-like carbon structure, and diamond grains embedded on the balls. Raman spectra and surface resistance measurement also indicate that the films are highly graphitic diamond films. The field emitter was made of the diamond-ball like carbon film cathode and ITO anode. The transparent conducting anode technique was used to measure the 1-V curves and the emission sites. The measurements were operated in a vacuum system with a base pressure of 10^-4 torr. The turn-on field of 10 V/micrometers was obtained. After Ar⁺ ion impacting the highly graphitic diamond film cathode, the turn-on field was increased dramatically to 22 V/micrometers . The good quality diamond film emitter was also reported.

Citation Download Citation

Binglin Zhang, Ning Yao, Yunjun Li, Jintian He, and Xiaoping Wang "Field electron emission from highly graphitic diamond films", Proc. SPIE 3184, Microelectronic Packaging and Laser Processing, (18 August 1997); https://doi.org/10.1117/12.280578

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available