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Laser damage studies were recently introduced at LOSCM. We first describe our experimental set-up and its performances. The device is equipped with a 7 ns Nd : Y AG pulsed laser. Surface modifications due to laser irradiation are observed in real time through a Nomarski microscope placed behind the sample along the optical axis. The beam is aligned with a He-Ne laser and focused in a spot of 25 μmin diameter, which permits a localized study and the determination of intrinsic and extrinsic damage thresholds. The LIDT is determined by the real time Nomarski observation. To go further into the analysis of laser impact we use an Atomic Force Microscope with a micrometric repositioning system that permits a quantitative study. We detail the first results concerning LIDT and morphology of several materials produced by electron beam deposition at LOSCM (Zns, Na~IF6, Si02, Ta20 5, Hf02 and multidielectric mirrors). The whole characterization is performed in strong correlation with deposition parameters and cleanliness control, which allow us to draw a set of preliminary conclusions.
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