Measuring the size and intensity distribution of SEM beam spot

Alex Goldenshtein; Yaron I. Gold; Haim Chayet

doi:10.1117/12.308723

8 June 1998 Measuring the size and intensity distribution of SEM beam spot

Alex Goldenshtein, Yaron I. Gold, Haim Chayet

Proceedings Volume 3332, Metrology, Inspection, and Process Control for Microlithography XII; (1998) https://doi.org/10.1117/12.308723
Event: 23rd Annual International Symposium on Microlithography, 1998, Santa Clara, CA, United States

Abstract

In this paper, a method for measuring the SEM electron beam spot profile is reported: a thin (1 micrometer) film aperture is used as a knife-edge target, and scanned at high magnification. The derivative of the detected signal is proportional to the spot cross section width. High contrast is achieved at the edge of the aperture hole, because the hole boundary is well-defined and because the electron yield is zero inside the hole. Therefore, the measurement is independent of detection efficiency, electron collection and electron-material interaction. A non-zero spot size results in image blurring and reduced resolution. Knowledge of spot size and intensity distribution may be used, as in the Opal 7830Si, for countering this effect. Monitoring spot characteristics may also be used for diagnostic purposes, such as detecting astigmatism or misalignment.

Citation Download Citation

Alex Goldenshtein, Yaron I. Gold, and Haim Chayet "Measuring the size and intensity distribution of SEM beam spot", Proc. SPIE 3332, Metrology, Inspection, and Process Control for Microlithography XII, (8 June 1998); https://doi.org/10.1117/12.308723

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available