IR reflection spectra of the ZnO/Al2O3 structure

Evgenie F. Venger; A. V. Melnichuk; Y. A. Pasechnik; E. I. Sukhenko

doi:10.1117/12.306195

20 April 1998 IR reflection spectra of the ZnO/Al₂O₃structure

Evgenie F. Venger, A. V. Melnichuk, Y. A. Pasechnik, E. I. Sukhenko

Proceedings Volume 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997; (1998) https://doi.org/10.1117/12.306195
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1997, Kiev, Ukraine

Abstract

The textured zinc oxide layers on sapphire, prepared by plasma chemical vapor deposition, were investigated with IR reflection spectroscopy in the residual rays region. A computer analysis of variance was used to simulate the reflection spectra of the structure studied and to calculate both charge carrier concentration and mobility in the zinc oxide layers.

Citation Download Citation

Evgenie F. Venger, A. V. Melnichuk, Y. A. Pasechnik, and E. I. Sukhenko "IR reflection spectra of the ZnO/Al₂O₃structure", Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); https://doi.org/10.1117/12.306195

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