S. S. Andreev,1 Sergey V. Gaponov,1 Nikolai N. Salashchenko,1 E. A. Shamov,1 Leonid A. Shmaenok,2 Sergei V. Bobashev,3 Dmitrii M. Simanovski,3 Eugene N. Ragozin4
1Institute for Physics of Microstructures (Russia) 2A.F. Ioffe Physico-Technical Institute (Russia) and Institute for Plasma Physics (Netherlands) 3A.F. Ioffe Physico-Technical Institute (Russia) 4P.N. Lebedev Physics Institute (Russia)
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We report the experimental results on production of multilayer soft x-ray and EUV mirrors and their application in x-ray spectroscopy and fluorescence analysis, as well as for development of EUV lithographic and x-ray microscopic devices and soft x-ray point sources. The problem of the production and the investigation of short-period x-ray multilayers and multilayer (gamma) -filters is discussed.
S. S. Andreev,Sergey V. Gaponov,Nikolai N. Salashchenko,E. A. Shamov,Leonid A. Shmaenok,Sergei V. Bobashev,Dmitrii M. Simanovski, andEugene N. Ragozin
"Multilayer optics for x-ray and γ radiation", Proc. SPIE 3406, Current Russian Research in Optics and Photonics: New Methods and Instruments for Space- and Earth-based Spectroscopy in XUV, UV, IR, and Millimeter Waves, (25 June 1998); https://doi.org/10.1117/12.310983
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S. S. Andreev, Sergey V. Gaponov, Nikolai N. Salashchenko, E. A. Shamov, Leonid A. Shmaenok, Sergei V. Bobashev, Dmitrii M. Simanovski, Eugene N. Ragozin, "Multilayer optics for x-ray and gamma radiation," Proc. SPIE 3406, Current Russian Research in Optics and Photonics: New Methods and Instruments for Space- and Earth-based Spectroscopy in XUV, UV, IR, and Millimeter Waves, (25 June 1998); https://doi.org/10.1117/12.310983