Surface profilometry by wavelength scanning interferometry

Ichirou Yamaguchi; Akihiro Yamamoto; Masaru Yano

doi:10.1117/12.323305

29 September 1998 Surface profilometry by wavelength scanning interferometry

Ichirou Yamaguchi, Akihiro Yamamoto, Masaru Yano

Proceedings Volume 3407, International Conference on Applied Optical Metrology; (1998) https://doi.org/10.1117/12.323305
Event: International Conference on Applied Optical Metrology, 1998, Balatonfured, Hungary

Abstract

Parallel and absolute measurement of surface profiles are realized on objects including diffuse surfaces and discontinuities such as steps and holes. Sensitivity and range of measurements have been examined by using a dye laser with tuning range of 4.2 nm. Their dependences on axial positions and tilt angle are investigated experimentally for diffuse objects and milled ones. A narrow dip and a screw head that cannot be measured by other methods could be analyzed by the present method.

Citation Download Citation

Ichirou Yamaguchi, Akihiro Yamamoto, and Masaru Yano "Surface profilometry by wavelength scanning interferometry", Proc. SPIE 3407, International Conference on Applied Optical Metrology, (29 September 1998); https://doi.org/10.1117/12.323305

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