Paper
18 December 1998 1998 mask industry quality assessment
Emilio P. Gonzalez-Lao
Author Affiliations +
Abstract
The sixth annual mask industry assessment will survey numerous photomask companies for key performance measurements in the areas of safety, quality, delivery, and throughput time. The data compiled includes shipment volume, customer return rate, customer return reason, mask survival yield, delivery performance to schedule, throughput time, and safety incident rate from 1988 through Q2, 1998. New to the assessment is the addition of pellicle-related returns and pellicle failure reasons. The 1998 assessment contains data from eleven of the twelve 1997 participants and includes data from 3 new participants. Company identity remains protected by utilizing Arthur Anderson & Company to ensure confidentiality.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Emilio P. Gonzalez-Lao "1998 mask industry quality assessment", Proc. SPIE 3546, 18th Annual BACUS Symposium on Photomask Technology and Management, (18 December 1998); https://doi.org/10.1117/12.332863
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CITATIONS
Cited by 5 scholarly publications.
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KEYWORDS
Safety

Photomasks

Pellicles

Reticles

Printing

Cadmium

Clean room processes

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