Modular PC-controlled polarimetric ellipsometer with variable angle of incidence and spectral options

Tamas Mosoni; P. Petrik; Miklos Fried; Istvan Barsony

doi:10.1117/12.320966

19 August 1998 Modular PC-controlled polarimetric ellipsometer with variable angle of incidence and spectral options

Tamas Mosoni, P. Petrik, Miklos Fried, Istvan Barsony

Proceedings Volume 3573, OPTIKA '98: 5th Congress on Modern Optics; (1998) https://doi.org/10.1117/12.320966
Event: OPTIKA '98: Fifth Congress on Modern Optics, 1998, Budapest, Hungary

Abstract

We have built a modular, PC controlled ellipsometer with variable angle of incidence measuring possibility. We used a HeNe laser, PIN-diode detector and film polarizer in the analyzer and polarizer elements at first. The analyzer, polarizer and goniometer unit of the ellipsometer are moved by a computer controlled mechanism. The data processing program developed by us makes it possible to evaluate measurements with several angles of incidence, too, which are used to measure samples with complex layer structure. The units of the equipment are easily replaceable in consequence of modularity. It has been developed further to a spectroscopic ellipsometer in the spectral range of 400 to 641 nm by using a xenon lamp and a CCD array detector with optical grating as a diffraction element in spite of a laser and a PIN-diode detector. The analyzer was rotated by a step-motor (quasi-stationary method) or a DC-motor (dynamic method). These two methods allow the choice of a faster but less accurate (dynamic method) or a slower but very precise (quasi-stationary) measurements. Further development of the quasi-stationary arrangement will provide a speed comparable with the dynamic method together with a high accuracy.

Citation Download Citation

Tamas Mosoni, P. Petrik, Miklos Fried, and Istvan Barsony "Modular PC-controlled polarimetric ellipsometer with variable angle of incidence and spectral options", Proc. SPIE 3573, OPTIKA '98: 5th Congress on Modern Optics, (19 August 1998); https://doi.org/10.1117/12.320966

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