Paper
10 March 1999 Modeling and optimization of microcoils for telemetric transmission at frequencies up to 20 MHz
Sven Rehfuss, Claudia Marschner, Karl-Ludwig Krieger, Marcus Weser, Rainer Laur
Author Affiliations +
Proceedings Volume 3680, Design, Test, and Microfabrication of MEMS and MOEMS; (1999) https://doi.org/10.1117/12.341205
Event: Design, Test, and Microfabrication of MEMS/MOEMS, 1999, Paris, France
Abstract
Wireless transmission of data and energy is needed e.g. in medical applications and autonomous sensor systems, where the maximum size or the use of batteries are limited by system specific restrictions. A possible solution for frequencies up to 20 Mhz is the use of a transformer which consists of an air-cored and two rectangular microcoils. For simulation and optimization of the system an accurate model of the micro coil is needed to predict the terminal impedance. The model must map the geometrical and material specific parameters into the terminal impedance to avoid the use of correction factors and to obtain a wide range of validity. An accurate model is presented and verified by measurements made with realized micro coils. The model is implemented into the system simulator SABER along with other components of a sensor system. An optimization was carried out to gain optimal coil parameters. The optimization strategy is presented and the optimization was carried out to gain optimal coil parameters. The optimization strategy is presented and the optimization results agree very well with measurements made with a realized sensor system.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sven Rehfuss, Claudia Marschner, Karl-Ludwig Krieger, Marcus Weser, and Rainer Laur "Modeling and optimization of microcoils for telemetric transmission at frequencies up to 20 MHz", Proc. SPIE 3680, Design, Test, and Microfabrication of MEMS and MOEMS, (10 March 1999); https://doi.org/10.1117/12.341205
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Cited by 5 scholarly publications.
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KEYWORDS
Capacitance

Resistance

Optimization (mathematics)

Inductance

Data transmission

3D modeling

Oxides

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