Enhancement of the diffraction efficiency of titanium implanted gratings by associating them with optical interference coatings

Francois Flory; Ludovic Escoubas; Stephane Tisserand; Eric Nicolas; Gerard Albrand; F. Lemarchand; Laurent Roux

doi:10.1117/12.360094

7 September 1999 Enhancement of the diffraction efficiency of titanium implanted gratings by associating them with optical interference coatings

Francois Flory, Ludovic Escoubas, Stephane Tisserand, Eric Nicolas, Gerard Albrand, F. Lemarchand, Laurent Roux

Author Affiliations +

Proceedings Volume 3738, Advances in Optical Interference Coatings; (1999) https://doi.org/10.1117/12.360094
Event: Optical Systems Design and Production, 1999, Berlin, Germany

Abstract

Refractive index gratings made by titanium ion implantation are studied. Computations using the rigorous differential method and otpical measurements show that our gratings implanted in SiO₂ substrates have a diffraction efficiency of typically 2 percent in the 1st order. We propose to insert such grating in multilayer dielectric Fabry-Perot cavities in order to enhance the free space diffraction efficiency. Computations are performed by taking into account the index profile of the implanted zone. The best structure is obtained by optimizing the thickness of the implanted silica layer which is embedded between two mirrors. We study the dependence of optical properties of the structure with respect to various characteristic parameters such as the index profile, the multilayer design, the filling factor of the grating and the incident angle. To demonstrate the feasibility of such components, we focus our attention on an implanted grating embedded in a Fabry-Perot cavity whose mirrors have five dielectric layers. This component reaches a theoretical efficiency of 10 percent in the 1st order. First experimental results are presented.

Citation Download Citation

Francois Flory, Ludovic Escoubas, Stephane Tisserand, Eric Nicolas, Gerard Albrand, F. Lemarchand, and Laurent Roux "Enhancement of the diffraction efficiency of titanium implanted gratings by associating them with optical interference coatings", Proc. SPIE 3738, Advances in Optical Interference Coatings, (7 September 1999); https://doi.org/10.1117/12.360094

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