Structural and mechanical properties of evaporated pure and mixed MgF2-BaF2 thin films

Roland Thielsch; Matthieu Pommies; Joerg Heber; Norbert Kaiser; Jens Ullmann

doi:10.1117/12.360125

7 September 1999 Structural and mechanical properties of evaporated pure and mixed MgF₂-BaF₂ thin films

Roland Thielsch, Matthieu Pommies, Joerg Heber, Norbert Kaiser, Jens Ullmann

Proceedings Volume 3738, Advances in Optical Interference Coatings; (1999) https://doi.org/10.1117/12.360125
Event: Optical Systems Design and Production, 1999, Berlin, Germany

Abstract

To grow dense and hard MgF₂ films substrate temperatures of about 300 degrees C are required, which unfortunately leads to high tensile film stress and the ability of crack formation. Lowering tensile stress in MgF₂ films can be achieved by admixture a second fluoride material of higher cation radius than Mg²⁺. While former investigation were performed with non-heated films the purpose of the present work was to verify the behavior of mixed films when deposited at elevated substrate temperatures. One of the promising add material is BaF₂ which enables evaporation of appropriate pre-mixed materials from a single source. The BaF₂ content in the mixed films was varied from 3 to 55 mol percent in the MgF₂ host. Optical, mechanical, and structural properties of samples deposited at different substrate temperatures have been studied by spectral photometry, IR spectroscopy, ex situ measurement of mechanical stress, x-ray diffraction, and -reflectometry, RBS, as well as investigation of surface morphology.

Citation Download Citation

Roland Thielsch, Matthieu Pommies, Joerg Heber, Norbert Kaiser, and Jens Ullmann "Structural and mechanical properties of evaporated pure and mixed MgF₂-BaF₂ thin films", Proc. SPIE 3738, Advances in Optical Interference Coatings, (7 September 1999); https://doi.org/10.1117/12.360125

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