Geometric phase coherence probe microscope for surface profiling

Maitreyee Roy; L. Cherel; Colin J. R. Sheppard

doi:10.1117/12.354836

19 July 1999 Geometric phase coherence probe microscope for surface profiling

Maitreyee Roy, L. Cherel, Colin J. R. Sheppard

Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.354836
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States

Abstract

We have developed a computer-controlled coherence probe microscope which can rapidly and accurately map the shape of micro-machined surfaces exhibiting steps and discontinuities. The instrument uses white-light and scans the object in height. The novel feature of the instrument is the use of an achromatic phase-shifter operating on the principle of geometric phase to evaluate the fringe visibility directly for each point on the object. This allows location of the position of the visibility peak along the scanning axis, yielding the height of the surface at the corresponding points.

Citation Download Citation

Maitreyee Roy, L. Cherel, and Colin J. R. Sheppard "Geometric phase coherence probe microscope for surface profiling", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.354836

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available