Phase-shift error calibration in modulation measurement profilometry

Likun Su; Wansong Li; Xianyu Su; Liqun Xiang

doi:10.1117/12.354877

19 July 1999 Phase-shift error calibration in modulation measurement profilometry

Likun Su, Wansong Li, Xianyu Su, Liqun Xiang

Proceedings Volume 3749, 18th Congress of the International Commission for Optics; (1999) https://doi.org/10.1117/12.354877
Event: ICO XVIII 18th Congress of the International Commission for Optics, 1999, San Francisco, CA, United States

Abstract

Modulation value play a significant role in Modulation Measurement Profilometry. By projection sinusoidal fringe on an object, then shift the sinusoidal grating in one period L(L >= 3) times with equal interval, we can calculate the modulation distribution on the object with these L frames of the fringe pattern. Incorrect modulation can arise when phase-shift error exist. In this paper we give out the general expression of modulation calculation for any phase- shift interval with least-square method when L equals 5. The result proved that the calibration is necessary and useful when phase-shift error exist.

Citation Download Citation

Likun Su, Wansong Li, Xianyu Su, and Liqun Xiang "Phase-shift error calibration in modulation measurement profilometry", Proc. SPIE 3749, 18th Congress of the International Commission for Optics, (19 July 1999); https://doi.org/10.1117/12.354877

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