Electron-beam-induced emission of electrons from insulators

Anatoly M. Filachev; Boris I. Fouks; Dmitrii E. Greenfield

doi:10.1117/12.370118

15 November 1999 Electron-beam-induced emission of electrons from insulators

Anatoly M. Filachev, Boris I. Fouks, Dmitrii E. Greenfield

Proceedings Volume 3777, Charged Particle Optics IV; (1999) https://doi.org/10.1117/12.370118
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1999, Denver, CO, United States

Abstract

Under e-beam irradiation of insulators the introduced electron charge is accumulated in the material. As a result an electric field appears and increases with time causing parasitic deflection of the beam and decrease of the energy of incident electrons. This general problem creates seemingly insuperable obstacles to the e-beam processing and electron microscopy of insulators. However the presented extended study of the physical processes accompanying electron irradiation of insulators has allowed to find the ways around this problem, especially of the case of e-beam engraving studied with full details.

Citation Download Citation

Anatoly M. Filachev, Boris I. Fouks, and Dmitrii E. Greenfield "Electron-beam-induced emission of electrons from insulators", Proc. SPIE 3777, Charged Particle Optics IV, (15 November 1999); https://doi.org/10.1117/12.370118

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