PROCEEDINGS VOLUME 3878
SYMPOSIUM ON MICROMACHINING AND MICROFABRICATION | 20-22 SEPTEMBER 1999
Miniaturized Systems with Micro-Optics and MEMS
Editor Affiliations +
IN THIS VOLUME

8 Sessions, 44 Papers, 0 Presentations, 0 Posters
MOEM Devices  (5)
SYMPOSIUM ON MICROMACHINING AND MICROFABRICATION
20-22 September 1999
Santa Clara, CA, United States
MOEM Scanners
Thomas W. Krygowski, David Reyes, M. Steven Rodgers, James H. Smith, Mial E. Warren, William C. Sweatt, Olga Blum-Spahn, Joel R. Wendt, Randolph E. Asbill
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361250
Ulrich Hofmann, Sascha Muehlmann, Martin Witt, Klaus Doerschel, Rijk Schuetz, Bernd Wagner
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361269
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361276
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361286
Karla Hiller, Ramon Hahn, Christian Kaufmann, Steffen Kurth, Kersten Kehr, Thomas Gessner, Wolfram Doetzel, M. Wiemer, I. Schubert
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361290
Micromirror Devices
M. Adrian Michalicek, Wenge Zhang, Kevin F. Harsh, Victor M. Bright, Y. C. Lee
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361291
Kersten Kehr, Steffen Kurth, Jan Mehner, Christian Kaufmann, Ramon Hahn, Wolfram Doetzel, Thomas Gessner
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361292
Adisorn Tuantranont, Victor M. Bright, Wenge Zhang, Jianglong Zhang, Y. C. Lee
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361293
Byungwoo Park, Jonguk Bu, Dongil Kwon
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361251
Gwo-Bin Lee, Thomas Tsao
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361252
MOEMS Switches/Shutters
Min-fan Pai, Norman C. Tien
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361253
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361254
Rolf Goering, Thomas Martin, Bernt Goetz, Dirk Doering
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361255
Peter Krippner, Juergen Mohr, Volker Saile
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361256
Thomas Seifert, Rainer Riesenberg, Peter Buecker, Thomas Martin, Bernt Goetz
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361257
Marco Pizzi, Valerian Koniachkine, Elena Bassino, Sabino Sinesi, Piero P. Perlo
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361258
MOEMS for Sensing Applications
Paolo Bondavalli, Taha Benyattou, Michel Garrigues, Jean Louis Leclercq, Philippe Regreny, K. Sun, Pierre Viktorovitch, Sebastein Cortial, Xavier Hugon, et al.
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361259
Mial E. Warren, William C. Sweatt, Joel R. Wendt, Christopher A. Bailey, Carolyn M. Matzke, D. W. Arnold, Shanalyn A. Kemme, Andrew A. Allerman, T. R. Carter, et al.
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361260
Fariborz Maseeh, Andrew Swiecki
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361261
Hiromi Totani, Masaaki Ikeda, Akira Akiba, Takahiro Masuda, Hiroshi Goto, Mikio Matsumoto
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361262
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361263
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361264
MOEM Devices
David W. Plummer
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361265
Chung-Hoon Lee, Amit Lal
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361266
Scott C. Holswade, Fred M. Dickey, Charles T. Sullivan, Marc A. Polosky, Richard N. Shagam
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361267
Boyd M. Evans III, D. W. Schonberger, Panos G. Datskos
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361268
MOEMS for Display Application
Klaus Reimer, R. Engelke, Martin Witt, Bernd Wagner
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361270
Jeremy M. Dawson, Jingdong Chen, Kolin S. Brown, Parviz F. Famouri, Lawrence Anthony Hornak
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361271
Liuqiang Zhang, Gen Qing Yang
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361272
MOEMS Integration
Alexander Ksendzov, Richard D. Martin, Darius Modarress, Mory Gharib
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361273
Hiroshi Eda, Yoshio Yamamoto, Takuji Ishikawa, Libo Zhou, T. Kawakami
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361274
Richard N. Shagam, Fred M. Dickey, Scott C. Holswade
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361275
Jeong-Bong Lee, Mark G. Allen, Ajeet Rohatgi
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361277
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361278
Poster Session
Katsuhisa Toshima, Harunobu Sato, Mitsuteru Kimura
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361279
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361280
Edward S. Kolesar Jr., Peter B. Allen, Noah C. Boydston, Jeffrey T. Howard, Simon Y. Ko, Josh M. Wilken
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361281
Ki-Chang Song, Jonguk Bu, Young-Sam Jeon, Chil-Keun Park, Jae-Hoon Jeong, Han-Joon Koh, Min-Ho Choi
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361282
Niculae Dumbravescu, Silviu Schiaua
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361283
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361284
Youngjoo Yee, Young-Sam Jeon, Jonguk Bu, Geun-ho Kim
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361285
Keith W. Goossen, James A. Walker, Joseph Earl Ford
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361287
David Calton, Tom Stevenson, Ian Underwood, Alan M. Gundlach
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361288
MOEM Devices
Hans-Dieter Bauer, Wolfgang Ehrfeld, Thomas Paatzsch, Ingo Smaglinski, Lutz Weber
Proceedings Volume Miniaturized Systems with Micro-Optics and MEMS, (1999) https://doi.org/10.1117/12.361289
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