Photovoltaic on-demand high-voltage pulse generator as an on-board power source for electrostatic actuator array

Jeong-Bong Lee; Mark G. Allen; Ajeet Rohatgi

doi:10.1117/12.361277

2 September 1999 Photovoltaic on-demand high-voltage pulse generator as an on-board power source for electrostatic actuator array

Jeong-Bong Lee, Mark G. Allen, Ajeet Rohatgi

Author Affiliations +

Proceedings Volume 3878, Miniaturized Systems with Micro-Optics and MEMS; (1999) https://doi.org/10.1117/12.361277
Event: Symposium on Micromachining and Microfabrication, 1999, Santa Clara, CA, United States

Abstract

The use of amorphous silicon solar cell array high voltage power source as an on-demand wireless power source for electrostatically actuated 32 X 32 micromirror array is presented. The amorphous silicon solar cell array has been reported previously by authors of this paper. In this work, the solar cell array has been used to drive distributed electrostatic actuator array (micromirror array in this particular paper). A 32 X 32 micromirror array has been fabricated and the size of single micromirror is 200 micrometer X 200 micrometer. Static deflection test of micromirrors has been carried out and pull-in voltage of 44 V and releasing voltage of 30 V was found. The electrical output of the solar cell array has been directly connected to the 32 X 32 micromirror array to demonstrate a wireless powered distributed MEMS actuator array. A total solar cell array area of 0.3 cm² (30 series-interconnected solar cells) were used to drive a part of 32 X 32 micromirror array (a total array area of 0.4 cm²). Motion of multiple numbers of micromirrors was reproducibly observed. The ultimate goal of this research is to achieve power-integrated autonomous MEMS using solar cell array as a miniaturized wireless on-board power source and distributed actuator array as a locomotive engine.

Citation Download Citation

Jeong-Bong Lee, Mark G. Allen, and Ajeet Rohatgi "Photovoltaic on-demand high-voltage pulse generator as an on-board power source for electrostatic actuator array", Proc. SPIE 3878, Miniaturized Systems with Micro-Optics and MEMS, (2 September 1999); https://doi.org/10.1117/12.361277

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