Reliable curvature sensor for measuring the topography of complex surfaces

Michael Schulz; Peter Thomsen-Schmidt; Ingolf Weingaertner

doi:10.1117/12.401614

29 September 2000 Reliable curvature sensor for measuring the topography of complex surfaces

Michael Schulz, Peter Thomsen-Schmidt, Ingolf Weingaertner

Proceedings Volume 4098, Optical Devices and Diagnostics in Materials Science; (2000) https://doi.org/10.1117/12.401614
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

The problem of measuring steep aspheres with high accuracy has not yet been generally solved. In this presentation, a particular sensor type is presented which can be used to measure the form of optically smooth surfaces with no restrictions as regards lateral extent or complexity. It is a curvature sensor which can be guided along the surface. Curvature is an intrinsic property of the artifacts, which is independent of its position and angular orientation.

Citation Download Citation

Michael Schulz, Peter Thomsen-Schmidt, and Ingolf Weingaertner "Reliable curvature sensor for measuring the topography of complex surfaces", Proc. SPIE 4098, Optical Devices and Diagnostics in Materials Science, (29 September 2000); https://doi.org/10.1117/12.401614

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