Infrared thermal imaging of SiNx membranes

Andrea Irace; Giovanni Breglio; Paolo Spirito; Pasqualina M. Sarro

doi:10.1117/12.409838

15 December 2000 Infrared thermal imaging of SiN_x membranes

Andrea Irace, Giovanni Breglio, Paolo Spirito, Pasqualina M. Sarro

Proceedings Volume 4130, Infrared Technology and Applications XXVI; (2000) https://doi.org/10.1117/12.409838
Event: International Symposium on Optical Science and Technology, 2000, San Diego, CA, United States

Abstract

In this paper we present preliminary experimental results of static thermal mapping for the characterization of thermal properties of single or multilayer thin film membranes. Based on direct radiometric measurement, the proposed system is able to acquire, with high spatial (less than 10 micrometers ) and quite good temperature (less than 0.1 degree(s)C) resolution, the temperature maps. The results, reported here, confirm its capability. We tested a low stress LPCVD SiN membrane heated by means of a LPCVD polysilicon (PS) resistor. The experimental results obtained are in qualitative agreement with theoretical previsions.

Citation Download Citation

Andrea Irace, Giovanni Breglio, Paolo Spirito, and Pasqualina M. Sarro "Infrared thermal imaging of SiN_x membranes", Proc. SPIE 4130, Infrared Technology and Applications XXVI, (15 December 2000); https://doi.org/10.1117/12.409838

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