Structural peculiarities of metal alloy and multilayer films synthesized from laser erosion plasma

Andre A. Gorbunov; A. Tselev; A. Levin; Axel Mensch; D. C. Meyer; J. Noetzel; F. Prokert; W. Pompe

doi:10.1117/12.413765

30 January 2001 Structural peculiarities of metal alloy and multilayer films synthesized from laser erosion plasma

Andre A. Gorbunov, A. Tselev, A. Levin, Axel Mensch, D. C. Meyer, J. Noetzel, F. Prokert, W. Pompe

Proceedings Volume 4157, Laser-Assisted Microtechnology 2000; (2001) https://doi.org/10.1117/12.413765
Event: Laser-Assisted Microtechnology 2000, 2000, St. Petersburg-Pushkin, Russian Federation

Abstract

Results of experimental investigations and numerical simulations of thin films and multilayers of Fe-Al and Co-Cu binary systems synthesized by PLD are presented. The influence of specific features of PLF on the structure of thin metal and alloy films is discussed. Examples of non- conventional microstructure formation are given.

Citation Download Citation

Andre A. Gorbunov, A. Tselev, A. Levin, Axel Mensch, D. C. Meyer, J. Noetzel, F. Prokert, and W. Pompe "Structural peculiarities of metal alloy and multilayer films synthesized from laser erosion plasma", Proc. SPIE 4157, Laser-Assisted Microtechnology 2000, (30 January 2001); https://doi.org/10.1117/12.413765

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