Toward determining cost, quality, and turn-around time of MEMS devices fabricated in a distributed prototyping environment

William L. Benard; Kaigham J. Gabriel; Michael A. Huff

doi:10.1117/12.396436

25 August 2000 Toward determining cost, quality, and turn-around time of MEMS devices fabricated in a distributed prototyping environment

William L. Benard, Kaigham J. Gabriel, Michael A. Huff

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Proceedings Volume 4174, Micromachining and Microfabrication Process Technology VI; (2000) https://doi.org/10.1117/12.396436
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

The MEMS Exchange is a DARPA funded research program to provide the domestic MEMS community with an interface between MEMS designers and microfabrication facilities to allows designer to develop and exercise custom process sequences. These process sequences may cross the boundaries separating fabrication facilities in order to maximize process and design freedom. Information transfer within the MEMS-Exchange fabrication network takes place almost exclusively via the Internet, so process information and metrology data is available to customers near real time. In order for the designers to utilize such a facility, basic operational information about the execution of a process sequence, such as price, turn-around time and quality must be available. Time stamps, process metrology and cost data are all captured as part of routine MEMS Exchange operation. Special operations instrumentation has also been implemented in a software tool called the Process Event Logger to measure process requirements in terms of machine and staff time, and to determine the costs of delayed information, materials and equipment availability. The initial data is presented which is intended to be used to develop a model for MEMS prototyping fabrication to determine expected cost, turn-around time and quality for custom process sequences.

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William L. Benard, Kaigham J. Gabriel, and Michael A. Huff "Toward determining cost, quality, and turn-around time of MEMS devices fabricated in a distributed prototyping environment", Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); https://doi.org/10.1117/12.396436

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KEYWORDS

Microelectromechanical systems

Prototyping

Custom fabrication

Data modeling

Metrology

Time metrology

Data processing

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