New type of micropump using SMA thin film actuator

Tongyu Wang; Huilin Jiang

doi:10.1117/12.401767

5 October 2000 New type of micropump using SMA thin film actuator

Tongyu Wang, Huilin Jiang

Proceedings Volume 4223, Instruments for Optics and Optoelectronic Inspection and Control; (2000) https://doi.org/10.1117/12.401767
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

In this paper, a new prototype model of a micropump using a SMA thin film actuator as the servo actuator is proposed. This micropump consist of two one-way valves that make use of the same SMA thin film actuator. The overall size of this micropump prototype is 12mm in diameter and 20mm in length. The characteristics of the micropump were measured, experimental results indicating that the micropump provides satisfactory responses.

Citation Download Citation

Tongyu Wang and Huilin Jiang "New type of micropump using SMA thin film actuator", Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); https://doi.org/10.1117/12.401767

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