Paper
29 June 2001 Capacitive discharge excilamps with short duration of radiation pulse
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Abstract
Power characteristics of four excilamps with short-pulse duration discharge plasma radiation have been investigated experimentally. At mixture pressure of 30 Torr the radiation pulse power density has made at (lambda) approximately 222 nm 0.2 kW/cm2, 0.15 kW/cm2, 0.09 kW/cm2 for I-, H- and L-type excilamps, respectively. The maximal radiation pulse power density was received for modernized I-type excilamp and it has made 0.3 kW/cm2. It has been revealed that pulse radiation output is mostly determined by excilamp voltage value, discharge geometry, value of peaking capacitance, and gas medium density.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Victor F. Tarasenko, Mikhail V. Erofeev, Mikhail I. Lomaev, Edward A. Sosnin, and Dmitrii V. Shitz "Capacitive discharge excilamps with short duration of radiation pulse", Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); https://doi.org/10.1117/12.432545
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KEYWORDS
Pulsed power

Lamps

Capacitance

Light sources and illumination

Photodiodes

Switches

Transformers

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