Chalcogenide three-dimensional photonic structures

A. I. Feigel; Zvi Kotler; Bruno Sfez; A. Arsh; Matvei Klebanov; Victor Lyubin

doi:10.1117/12.426829

15 May 2001 Chalcogenide three-dimensional photonic structures

A. I. Feigel, Zvi Kotler, Bruno Sfez, A. Arsh, Matvei Klebanov, Victor Lyubin

Proceedings Volume 4277, Integrated Optics Devices V; (2001) https://doi.org/10.1117/12.426829
Event: Symposium on Integrated Optics, 2001, San Jose, CA, United States

Abstract

AsSeTe/AsSe chalcogenide glasses are photosensitive materials with large refractive index. These properties make these glasses suitable for the fabrication of photonic crystals, waveguide components and MOEMS. We present in this article fabrication of 3D photonic crystals, composed from AsSeTe and air, with sub-micron feature size. The method of fabrication is relatively simple and cheap using only vapor deposition and optical holographic lithography. The interferometric alignment allows to eliminate requirement for a mask aligner.

Citation Download Citation

A. I. Feigel, Zvi Kotler, Bruno Sfez, A. Arsh, Matvei Klebanov, and Victor Lyubin "Chalcogenide three-dimensional photonic structures", Proc. SPIE 4277, Integrated Optics Devices V, (15 May 2001); https://doi.org/10.1117/12.426829

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