Modification of the surface roughness spectrum by means of power laser radiation

Valerii P. Aksenov; G. N. Mikhailova; Johannes Boneberg; Paul Leiderer; H.-J. Muenzer

doi:10.1117/12.431203

26 June 2001 Modification of the surface roughness spectrum by means of power laser radiation

Valerii P. Aksenov, G. N. Mikhailova, Johannes Boneberg, Paul Leiderer, H.-J. Muenzer

Proceedings Volume 4423, Nonresonant Laser-Matter Interaction (NLMI-10); (2001) https://doi.org/10.1117/12.431203
Event: Nonresonant Laser-Matter Interaction (NLMI-10), 2000, St. Petersburg, Russian Federation

Abstract

We study the periodic damage structures that can be produced don the rough-surface of semiconductor when they are irradiated with a single beam of intense laser radiation. We observed a formation of periodic surface structures for porous Si with microscopic surface roughens. In the case of more strong rough Ge we observed an opposite effect to ripple formation: i.e. an effective destruction of resonance Fourier components of the random disturbed surface.

Citation Download Citation

Valerii P. Aksenov, G. N. Mikhailova, Johannes Boneberg, Paul Leiderer, and H.-J. Muenzer "Modification of the surface roughness spectrum by means of power laser radiation", Proc. SPIE 4423, Nonresonant Laser-Matter Interaction (NLMI-10), (26 June 2001); https://doi.org/10.1117/12.431203

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