Paper
9 November 2001 Fabrication of organic photonic crystals for optical wavelengths
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Abstract
We present a novel method for making 2D photonic crystal structures. The method relies on different dissolution rates of various organic materials in the developer. Thus, placing a layer of high dissolution rate material under a layer of low dissolution rate material yields a membrane released from the substrate where the photonic crystal has been patterned. This allows for creation of the entire structure in a single chemical development step. We present structures fabricated with this method.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Janusz A. Murakowski and Dennis W. Prather "Fabrication of organic photonic crystals for optical wavelengths", Proc. SPIE 4440, Lithographic and Micromachining Techniques for Optical Component Fabrication, (9 November 2001); https://doi.org/10.1117/12.448035
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CITATIONS
Cited by 1 scholarly publication.
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KEYWORDS
Photonic crystals

Crystals

Polymethylmethacrylate

Electron beam lithography

Crystal optics

Refractive index

Scanning electron microscopy

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