Fabrication Of Free-Standing X-Ray Transmission Gratings And Zone Plates

Y Vladimirsky; E Kallne; Eberhard Spiller

doi:10.1117/12.939204

19 March 1984 Fabrication Of Free-Standing X-Ray Transmission Gratings And Zone Plates

Y Vladimirsky, E Kallne, Eberhard Spiller

Author Affiliations +

Proceedings Volume 0448, X-Ray Lithography and Applications of Soft X-Rays to Technology; (1984) https://doi.org/10.1117/12.939204
Event: 27th Annual Technical Symposium, 1983, San Diego, United States

Abstract

Free-standing transmission gratings and zone plates which are to be used as dispersion elements for x rays have been fabricated with UV holography and x-ray lithography.

Citation Download Citation

Y Vladimirsky, E Kallne, and Eberhard Spiller "Fabrication Of Free-Standing X-Ray Transmission Gratings And Zone Plates", Proc. SPIE 0448, X-Ray Lithography and Applications of Soft X-Rays to Technology, (19 March 1984); https://doi.org/10.1117/12.939204

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