Anodic alumina as a material for MEMS

Kirill I. Delendik; Olga L. Voitik

doi:10.1117/12.448987

21 November 2001 Anodic alumina as a material for MEMS

Kirill I. Delendik, Olga L. Voitik

Proceedings Volume 4592, Device and Process Technologies for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448987
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

A new promising material for MEMS elements - anodic aluminium oxide is described. There were developed few methods of anodic aluminium oxide MEMS elements production on the base of microelectronic technology. Described methods of 3D MEMS elements obtaining can essentially supplement and in some cases substitute existing LIGA-like technologies owing to their cheapness and simplicity. It is necessary to point out that the realization of MEMS elements by described methods requires no complex and expensive equipment.

Citation Download Citation

Kirill I. Delendik and Olga L. Voitik "Anodic alumina as a material for MEMS", Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); https://doi.org/10.1117/12.448987

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