Fabrication method of 3D feed horn shape MEMS antenna array using MRPBI system and application for microbolometer

Jong-Yeon Park; Kuntae Kim; Sung Moon; Jong-Oh Park; Myung-Hwan Oh; James Jungho Pak

doi:10.1117/12.448991

21 November 2001 Fabrication method of 3D feed horn shape MEMS antenna array using MRPBI system and application for microbolometer

Jong-Yeon Park, Kuntae Kim, Sung Moon, Jong-Oh Park, Myung-Hwan Oh, James Jungho Pak

Author Affiliations +

Proceedings Volume 4592, Device and Process Technologies for MEMS and Microelectronics II; (2001) https://doi.org/10.1117/12.448991
Event: International Symposium on Microelectronics and MEMS, 2001, Adelaide, Australia

Abstract

A 3D Feed horn shape MEMS antenna has some attractive features for array application, which can be used to improve microbolometer performance. Since MEMS technology have been faced many difficulties to fabrication of 3D feed horn shape MEMS antenna array itself. The purpose of this paper is to propose a new fabrication method to realize a 3D feed horn shape MEMS antenna array using a MRPBI(Mirror Reflected Parallel Beam Illuminator) system with an ultra-slow-rotated and inclined x-y-z stage. A high-aspect-ratio 300 micrometers sidewalls had been fabricated using SU-8 negative photo resist. It can be demonstrated to feasibility of realize 3D feed horn shape MEMS antenna array fabrication. In order to study the effect of this novel technique, the 3D feed horn shape MEMS antenna array had been simulated with HFSS(High Frequency Structure Simulator) tools and then compared with traditional 3D theoretical antenna models. As a result, it seems possible to use a 3D feed horn shape MEMS antenna at the tera hertz band to improve microbolometer performance and optical MEMS device fabrication.

Citation Download Citation

Jong-Yeon Park, Kuntae Kim, Sung Moon, Jong-Oh Park, Myung-Hwan Oh, and James Jungho Pak "Fabrication method of 3D feed horn shape MEMS antenna array using MRPBI system and application for microbolometer", Proc. SPIE 4592, Device and Process Technologies for MEMS and Microelectronics II, (21 November 2001); https://doi.org/10.1117/12.448991

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KEYWORDS

Antennas

Microelectromechanical systems

Microbolometers

3D modeling

Ultraviolet radiation

Photoresist materials

Mirrors

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