Capacitance-coupling micromechanical filter

Binking Zhang; Qing-An Huang

doi:10.1117/12.444726

15 October 2001 Capacitance-coupling micromechanical filter

Binking Zhang, Qing-An Huang

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444726
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

It is a focus to study the micromechanical filter coupled by a number of resonators, because the micromechanical resonators have a high quality factor (Q). At present, the structures of flexural vibration of coupling beam and elastic vibration of rectangle frame are mainly studied methods of coupling. In this paper, a purely electronic coupling method is introduced. Micromachined capacitance is used to take place of the mechanical coupling structure. To this filter, under the effect of the coupling capacitance, the output current from the prevenient resonator will produce a driving voltage to next one. So the next vibrates, and so as the filter. It is not equal for all coupling factors, so the resonator dimension must be different to each other. In this work, for the purpose of every resonating circuit resonates at one frequency, the circuit is modified. Using capacitance to coupling resonator, one could decrease the effect of process, and weaken the distortion of the fabrication of the passband. In addition, the fabrication process of the coupling capacitance could be compatible to IC process.

Citation Download Citation

Binking Zhang and Qing-An Huang "Capacitance-coupling micromechanical filter", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444726

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