Mechanics characteristics of an electrostatic optical switch

Yuan Luo; Yi Zhang; Shanglian Huang

doi:10.1117/12.444687

15 October 2001 Mechanics characteristics of an electrostatic optical switch

Yuan Luo, Yi Zhang, Shanglian Huang

Proceedings Volume 4601, Micromachining and Microfabrication Process Technology and Devices; (2001) https://doi.org/10.1117/12.444687
Event: International Symposium on Optoelectonics and Microelectronics, 2001, Nanjing, China

Abstract

Optical switch is one of key supporting technologies in all-optical-network (AON) and electrostatic MEMS (Micro-Electro-Mechanical Systems) optical switch plays a very important role in the research of all-optical switch. The mechanics characteristics of the very thin beam and the micro-mirror in the structure of the electrostatic switch will influence the reliability and power consumption of the switch. In this paper, the relation between the sizes of the structure and the mechanics performance of the optical switch is discussed and simulated. In order to have high reliability, optimization designing of the beam and micro-mirror must be taken into account.

Citation Download Citation

Yuan Luo, Yi Zhang, and Shanglian Huang "Mechanics characteristics of an electrostatic optical switch", Proc. SPIE 4601, Micromachining and Microfabrication Process Technology and Devices, (15 October 2001); https://doi.org/10.1117/12.444687

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