Benchmarking of advanced CD-SEMs at the 130-nm CMOS technology node

Benjamin D. Bunday; Michael Bishop

doi:10.1117/12.473444

16 July 2002 Benchmarking of advanced CD-SEMs at the 130-nm CMOS technology node

Benjamin D. Bunday, Michael Bishop

Proceedings Volume 4689, Metrology, Inspection, and Process Control for Microlithography XVI; (2002) https://doi.org/10.1117/12.473444
Event: SPIE's 27th Annual International Symposium on Microlithography, 2002, Santa Clara, California, United States

Abstract

The Advanced Metrology Advisory Group (AMAG) is a council composed of the chief CD-metrologists from the International SEMATECH consortium's Member Companies and from the National Institute of Standards (NIST). The AMAG wrote and, in 2000, updated the 'Unified Advanced CD-SEM Specification for Sub- 0.18 micrometers Technology to be a living document which outlines the required performance of advanced CD-SEMs for vendor compliance to the International Technology Roadmap for Semiconductors, and also conveys other Member companies' collective needs to vendors. Following this specification, a benchmarking effort of the four currently available advanced CD-SEMs has been performed. This paper presents the result of this effort. Previous studies under this same project have ben published.

Citation Download Citation

Benjamin D. Bunday and Michael Bishop "Benchmarking of advanced CD-SEMs at the 130-nm CMOS technology node", Proc. SPIE 4689, Metrology, Inspection, and Process Control for Microlithography XVI, (16 July 2002); https://doi.org/10.1117/12.473444

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available