Improved convergence of electromechanical transducer element

Robert Sattler; Gerhard Wachutka

doi:10.1117/12.462818

19 April 2002 Improved convergence of electromechanical transducer element

Robert Sattler, Gerhard Wachutka

Proceedings Volume 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002; (2002) https://doi.org/10.1117/12.462818
Event: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, 2002, Cannes-Mandelieu, France

Abstract

Electrostatic attraction is a favored principle of actuation in MEMS (e.g. mirrors, relays, membrane devices). In this work we use an electrostatically actuated membrane as demonstrator. Physically based device models require the coupling of the electrostatic and the two domains. One way to reduce this expense consists in reduced order modeling by introducing a local approximation of the electric field using the Differential-Plate-Capacitor-Approximation (DPCA). This semi-analytical approximation can be directly (matrix coupled transducer element) or sequentially (load vector coupling) coupled with the mechanical solver. Both approaches yield results which agree well with those of coupled 3D-field solvers. It turns out that the transducer element converges much faster than the sequentially coupled relaxation scheme, as ong as the voltage is not close to the pull-in voltage. If this is the case then the transducer element has problems to find the equilibrium state at all. To avoid this difficulty we propose the use of a homotopy method to give the transducer element the same accuracy and robustness in the stable and the unstable regions of the operating area. The electrostatic charge and the electrostatic force turn out to be proper homotopy parameters for the given example.

Citation Download Citation

Robert Sattler and Gerhard Wachutka "Improved convergence of electromechanical transducer element", Proc. SPIE 4755, Design, Test, Integration, and Packaging of MEMS/MOEMS 2002, (19 April 2002); https://doi.org/10.1117/12.462818

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
8 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Transducers

Chemical elements

Capacitors

Finite element methods

Computer simulations

Electrodes

Instrument modeling

Show All Keywords

Keywords/Phrases

Search In:

Publication Years