EUV light source and laser considerations for scalability and high-energy conversion efficiency

Ian P. Mercer; Andrew Comley; Sebastian Davis-Ansted; Michael Egan; Samir S. Ellwi; Paul Harrison; Ian Henderson; Matt Kelly; Michael Mason; Mark Middleton; Ian Morris; Duncan Parsons-Karavassilis; Terrance Nowell; Peter Raven; Adrain Russel; David R. Klug; Alan G. Taylor

doi:10.1117/12.482129

13 September 2002 EUV light source and laser considerations for scalability and high-energy conversion efficiency

Ian P. Mercer, Andrew Comley, Sebastian Davis-Ansted, Michael Egan, Samir S. Ellwi, Paul Harrison, Ian Henderson, Matt Kelly, Michael Mason, Mark Middleton, Ian Morris, Duncan Parsons-Karavassilis, Terrance Nowell, Peter Raven, Adrain Russel, David R. Klug, Alan G. Taylor

Author Affiliations +

Proceedings Volume 4760, High-Power Laser Ablation IV; (2002) https://doi.org/10.1117/12.482129
Event: International Symposium on High-Power Laser Ablation 2002, 2002, Taos, New Mexico, United States

Abstract

Electrical to EUV conversion efficiency is a key parameter for systems scaled to EUV emission in the 100W regime. Improvement in efficiency of conversion from laser radiation at the EUV source, reduces the required laser power and as such can lend itself to reduced heat load and debris emission. Also, improvement in the electrical to laser conversion efficiency results in a direct reduction in cost of ownership. Laser solutions optimised for efficient conversion to high M² CW laser radiation are not optimised in design for efficient short-pulsed operation; the mode of operation required for EUV generation. Aspects of both EUV source and laser design are discussed, with a view to optimising conversion efficiency for scalable EUV solutions.

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Ian P. Mercer, Andrew Comley, Sebastian Davis-Ansted, Michael Egan, Samir S. Ellwi, Paul Harrison, Ian Henderson, Matt Kelly, Michael Mason, Mark Middleton, Ian Morris, Duncan Parsons-Karavassilis, Terrance Nowell, Peter Raven, Adrain Russel, David R. Klug, and Alan G. Taylor "EUV light source and laser considerations for scalability and high-energy conversion efficiency", Proc. SPIE 4760, High-Power Laser Ablation IV, (13 September 2002); https://doi.org/10.1117/12.482129

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