How to sensitively measure the rate of neutral free-radical production by photodeionization of negative ion beams

Keiji Hayashi; Hiroshi Konno; Hideki Kojima; Makoto Minato; Takashi Oseki; Yasunori Kawamura; Kenji Kameko; Takuo Kanayama

doi:10.1117/12.486564

19 February 2003 How to sensitively measure the rate of neutral free radical production by photo-deionization of negative ion beams

Keiji Hayashi, Hiroshi Konno, Hideki Kojima, Makoto Minato, Takashi Oseki, Yasunori Kawamura, Kenji Kameko, Takuo Kanayama

Author Affiliations +

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486564
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

Two measurement methods to determine the rate of neutral free radical production by the photo-deionization of negative ion beams ( PDINIB ) are introduced. These methods, namely, photoelectron-current measurement by low-frequency electro-modulation probe ( PMMP ) and measurement of decrease in the negative-ion beam current ( DNIC ) were employed to evaluate the production rate in a trail surface-processing apparatus developed in the author’s laboratory utilizing a steady-flux refined beam of neutral free radicals produced by the PDINIB procedure. A ⁶³Cu^- negative ion beam of kinetic energy E_i varied up to 15 keV was irradiated with a 514.5 nm visible light beam from a 25 W CW Ar⁺ ion laser. The detection limit of the production rate by the PMMP setup was as high as 6×10⁹/s under the condition that E_i = 15keV, the negative ion beam current I_i = 4 μA, and the laser power P = 6W. The DNIC method is simpler but less reliable than the PMMP method owing to larger uncertainty resulting from the fluctuation of the negative-ion beam current.

Citation Download Citation

Keiji Hayashi, Hiroshi Konno, Hideki Kojima, Makoto Minato, Takashi Oseki, Yasunori Kawamura, Kenji Kameko, and Takuo Kanayama "How to sensitively measure the rate of neutral free radical production by photo-deionization of negative ion beams", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486564

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available