Application of grazing incidence interferometer to rough surface measurement

Sen Han; Erik Novak; Joseph Sullivan

doi:10.1117/12.500108

30 May 2003 Application of grazing incidence interferometer to rough surface measurement

Sen Han, Erik Novak, Joseph Sullivan

Proceedings Volume 5144, Optical Measurement Systems for Industrial Inspection III; (2003) https://doi.org/10.1117/12.500108
Event: Optical Metrology, 2003, Munich, Germany

Abstract

In practical grazing incidence measurements using a commercial interferometer, repeatability and accuracy suffer from several effects related to part placement. In this paper, the authors analyzed three primary error resources in grazing incidence interferometry: incidence angle error, rotation angle error and included angle. The mathematical foundations of these errors as well as measurement results of several samples are presented showing the effects of each of these errors on. Using the test procedures described in the paper, the errors can be greatly reduced and the repeatability and accuracy increased by 20%.

Citation Download Citation

Sen Han, Erik Novak, and Joseph Sullivan "Application of grazing incidence interferometer to rough surface measurement", Proc. SPIE 5144, Optical Measurement Systems for Industrial Inspection III, (30 May 2003); https://doi.org/10.1117/12.500108

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