Ellipsometric investigations of polished surface of glass/ceramic with ultralow coefficient of the temperature expansion

Vladimir Petrovich Maslov; Anna Z. Sarsembaeva; Fiodor Fedorovych Sizov

doi:10.1117/12.543878

8 September 2004 Ellipsometric investigations of polished surface of glass/ceramic with ultralow coefficient of the temperature expansion

Vladimir Petrovich Maslov, Anna Z. Sarsembaeva, Fiodor Fedorovych Sizov

Author Affiliations +

Proceedings Volume 5454, Micro-Optics: Fabrication, Packaging, and Integration; (2004) https://doi.org/10.1117/12.543878
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

The results of ellipsometric investigations of surfaces of glassceramic samples with ultra low coefficient of thermal expansion are presented. These glassceramic samples are used in manufacturing of precision parts of optical instruments, for instance for telescope mirrors manufacturing. The aim of these investigations was to study the influence of the surface damaged layer and elastic deformations on the residual ellipticity of polished surfaces of glassceramic samples with ultra low temperature expansion coefficient. It was shown that with increasing of the surface layer polished depth damaged by grinding, the residual ellipticity decreases up to the value that remains a constant. Its value is determined by the material structure and stresses in the surface layer.

Citation Download Citation

Vladimir Petrovich Maslov, Anna Z. Sarsembaeva, and Fiodor Fedorovych Sizov "Ellipsometric investigations of polished surface of glass/ceramic with ultralow coefficient of the temperature expansion", Proc. SPIE 5454, Micro-Optics: Fabrication, Packaging, and Integration, (8 September 2004); https://doi.org/10.1117/12.543878

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available